# Publications-conferences.bib

@comment{{This file has been generated by bib2bib 1.99}}

@comment{{Command line: bib2bib -ob Publications-conferences.bib -c '$type = "INPROCEEDINGS" and (not hide : "true") and (not hide_online : "true") and (not note : "submitted")' /Users/Clemens/Documents/CV/Publications.bib}}  @inproceedings{Holly2022autoencoder, author = {Stephanie Holly AND Robin Heel AND Denis Katic AND Leopold Schoeffl AND Andreas Stiftinger AND Peter Holzner AND Thomas Kaufmann AND Bernhard Haslhofer AND Daniel Schall AND Clemens Heitzinger AND Jana Kemnitz}, title = {Autoencoder based anomaly detection and explained fault localization in industrial cooling systems}, booktitle = {Proc. 7th European Conference of the Prognostics and Health Management Society (PHM Society European Conference)}, address = {Turin, Italy}, key = {PHME 2022}, pages = {200-210}, month = {6--8 July}, year = 2022, url = {https://doi.org/10.36001/phme.2022.v7i1.3349}, pdf = {Papers/Holly2022autoencoder.pdf}, doi = {10.36001/phme.2022.v7i1.3349} }  @inproceedings{Taghizadeh2022Bayesian, author = {Leila Taghizadeh AND Ahmad Karimi AND Clemens Heitzinger}, title = {{Bayesian} approach for inverse problems in tomographic imaging}, booktitle = {Proc. SIAM Conference on Uncertainty Quantification (UQ 2022)}, address = {Atlanta, Georgia, USA}, key = {SIAM UQ 2022}, pages = {83}, month = {12--15 April}, year = 2022 }  @inproceedings{Holly2021evaluation, author = {Stephanie Holly AND Thomas Hiessl AND Safoura Rezapour Lakani AND Daniel Schall AND Clemens Heitzinger AND Jana Kemnitz}, title = {Evaluation of hyperparameter optimization approaches in an industrial federated learning system}, booktitle = {Proc. 4th International Data Science Conference (IDCS 2021)}, address = {digital event}, key = {IDCS 2021}, pages = {25-30}, month = {20--21 October}, year = 2021, url = {https://doi.org/10.1007/978-3-658-36295-9_1}, pdf = {Papers/Holly2021evaluation.pdf}, doi = {10.1007/978-3-658-36295-9_1}, abstract = {Federated Learning (FL) decouples model training from the need for direct access to the data and allows organizations to collaborate with industry partners to reach a satisfying level of performance without sharing vulnerable business information. The performance of a machine learning algorithm is highly sensitive to the choice of its hyperparameters. In an FL setting, hyperparameter optimization poses new challenges. In this work, we investigated the impact of different hyperparameter optimization approaches in an FL system. In an effort to reduce communication costs, a critical bottleneck in FL, we investigated a local hyperparameter optimization approach that – in contrast to a global hyperparameter optimization approach – allows every client to have its own hyperparameter configuration. We implemented these approaches based on grid search and Bayesian optimization and evaluated the algorithms on the MNIST data set using an i.i.d. partition and on an Internet of Things (IoT) sensor based industrial data set using a non-i.i.d. partition.} }  @inproceedings{Karimi2021Bayesian, author = {Ahmad Karimi AND Leila Taghizadeh AND Clemens Heitzinger}, title = {Optimal {Bayesian} experimental design for {EIT} inverse problems}, booktitle = {Proc. SIAM Conference on Computational Science and Engineering (CSE 2021)}, address = {Virtual conference, Fort Worth, Texas, USA}, key = {SIAM CSE 2021}, pages = {online}, month = {1--5 March}, year = 2021 }  @inproceedings{Heitzinger2020computational, author = {Clemens Heitzinger AND Daniel Pasterk AND Leila Taghizadeh}, title = {Computational {Bayesian} inversion for nanocapacitor-array biosensors and electrical-impedance tomography}, booktitle = {Proc. SIAM Conference on Uncertainty Quantification (UQ 2020)}, address = {Munich, Germany}, key = {SIAM UQ 2020}, pages = {online}, month = {24--27 March}, year = 2020, note = {\textit{Conference canceled due to COVID-19 pandemic}} }  @inproceedings{Khodadadian2020inversion, author = {Amirreza Khodadadian AND Nima Noii AND Maryam Parvizi AND Mostafa Abbaszadeh AND Thomas Wick AND Clemens Heitzinger}, title = {{Bayesian} inversion for variational phase-field fracture problems}, booktitle = {Proc. SIAM Conference on Uncertainty Quantification (UQ 2020)}, address = {Munich, Germany}, key = {SIAM UQ 2020}, pages = {online}, month = {24--27 March}, year = 2020, note = {\textit{Conference canceled due to COVID-19 pandemic}} }  @inproceedings{Lenzi2020interpreting, author = {Ervin K. Lenzi AND Luiz R. Evangelista AND Leila Taghizadeh AND Daniel Pasterk AND Rafael S. Zola AND Trifce Sandev AND Clemens Heitzinger AND Irina Petreska}, title = {Interpreting impedance spectroscopy data by using {Poisson-Nernst-Planck} anomalous models}, booktitle = {Proc. DPG (Deutsche physikalische Gesellschaft) Spring Meeting of the Condensed Matter Section}, address = {Dresden, Germany}, key = {DPG 2020}, pages = {DY 56.5}, month = {15--20 March}, year = 2020, note = {\textit{Conference canceled due to COVID-19 pandemic}} }  @inproceedings{Cossettini2019determination, author = {Andrea Cossettini AND Benjamin Stadlbauer AND Jose A. Morales Escalante AND Leila Taghizadeh AND Luca Selmi AND Clemens Heitzinger}, title = {Determination of micro- and nano-particle properties by multi-frequency {Bayesian} methods and applications to nanoelectrode array sensors}, booktitle = {Proc. IEEE Sensors 2019}, address = {Montreal, Canada}, key = {IEEE Sensors 2019}, pages = {1-4}, month = {27--30 October}, year = 2019 }  @inproceedings{Blankrot2019efficiently, author = {Boaz Blankrot AND Clemens Heitzinger}, title = {Efficiently optimizing inclusion rotation angle for maximal power flow}, booktitle = {Proc. 14th International Conference on Mathematical and Numerical Aspects of Wave Propagation (Waves)}, address = {Vienna, Austria}, key = {Waves 2019}, pages = {480-481}, month = {25--30 August 2019}, year = 2019 }  @inproceedings{Taghizadeh2019Innsbruck, author = {Leila Taghizadeh AND Clemens Heitzinger}, title = {{Bayesian} inference for two inverse problems in tomography and biofilms}, booktitle = {Proc. International Conference on Scientific Computation and Differential Equations 2019 (SciCADE 2019)}, address = {Innsbruck, Austria}, key = {SciCADE 2019}, pages = {280}, month = {22--26 July 2019}, year = 2019 }  @inproceedings{Heitzinger2019modeling, author = {Clemens Heitzinger AND Amirreza Khodadadian AND Daniel Pasterk AND Leila Taghizadeh}, title = {Modeling and simulation of nanotechnological sensors}, booktitle = {Proc. 9th International Congress on Industrial and Applied Mathematics (ICIAM 2019)}, address = {Valencia, Spain}, key = {ICIAM 2019}, pages = {309}, month = {15--19 July}, year = 2019 }  @inproceedings{Heitzinger2019Bayesian, author = {Clemens Heitzinger AND Leila Taghizadeh}, title = {{Bayesian} {PDE} inversion in electrical-impedance tomography}, booktitle = {Proc. 9th International Congress on Industrial and Applied Mathematics (ICIAM 2019)}, address = {Valencia, Spain}, key = {ICIAM 2019}, pages = {352}, month = {15--19 July}, year = 2019 }  @inproceedings{Khodadadian2019GAMM, author = {Amirreza Khodadadian AND Clemens Heitzinger}, title = {Bayesian inversion for nanoscale field-effect sensors using the stochastic drift-diffusion-{Poisson-Boltzmann} system}, booktitle = {Proc. 90th Annual Meeting of the International Association of Applied Mathematics and Mechanics (GAMM)}, address = {Vienna, Austria}, key = {GAMM 2019}, pages = {423}, month = {18--22 February 2019}, year = 2019 }  @inproceedings{Schneider2019GAMM, author = {Patrick Schneider AND Magdalena Schneider AND Gerhard Schütz AND Clemens Heitzinger}, title = {A clustering algorithm for single-molecule localization in super-resolution microscopy}, booktitle = {Proc. 90th Annual Meeting of the International Association of Applied Mathematics and Mechanics (GAMM)}, address = {Vienna, Austria}, key = {GAMM 2019}, pages = {532}, month = {18--22 February 2019}, year = 2019 }  @inproceedings{Taghizadeh2019GAMM, author = {Leila Taghizadeh AND Clemens Heitzinger}, title = {Bayesian analysis for the {Poisson-Boltzmann} equation modeling electrical-impedance tomography devices}, booktitle = {Proc. 90th Annual Meeting of the International Association of Applied Mathematics and Mechanics (GAMM)}, address = {Vienna, Austria}, key = {GAMM 2019}, pages = {422}, month = {18--22 February 2019}, year = 2019 }  @inproceedings{Blankrot2018automated, author = {Boaz Blankrot AND Clemens Heitzinger}, title = {Automated Design of Photonic Crystal Demultiplexers}, booktitle = {Proc. 12th International Congress on Artificial Materials for Novel Wave Phenomena (Metamaterials 2018)}, address = {Espoo, Finland}, key = {Metamaterials 2018}, pages = {55-77}, month = {27 August -- 1 September}, year = 2018 }  @inproceedings{Blankrot2018optimization, author = {Boaz Blankrot AND Clemens Heitzinger}, title = {Optimization centric approach for electromagnetic scattering from metamaterials}, booktitle = {Proc. 2018 SIAM Annual Meeting (AN18)}, address = {Portland, OR, USA}, key = {SIAM AN 2018}, pages = {62}, month = {9--13 July}, year = 2018 }  @inproceedings{Heitzinger2018Bayesian, author = {Clemens Heitzinger AND Jose Morales Escalante AND Benjamin Stadlbauer AND Leila Taghizadeh}, title = {{Bayesian} estimation and machine learning: current problems and challenges with examples in electrical impedance tomography and nanosensors}, booktitle = {Proc. Workshop on Research Challenges and Opportunities at the interface of Machine Learning and Uncertainty Quantification}, address = {University of Southern California, Los Angeles, CA, USA}, pages = {online}, month = {4--6 June}, year = 2018 }  @inproceedings{Pammer2018utilizing, author = {Gudmund Pammer AND Stefan Rigger AND Clemens Heitzinger}, title = {Utilizing multisymmetry properties in uncertainty quantification}, booktitle = {Proc. SIAM Conference on Uncertainty Quantification (UQ 2018)}, address = {Garden Grove, CA, USA}, key = {SIAM UQ 2018}, pages = {23-24}, month = {16--19 April}, year = 2018 }  @inproceedings{Stadlbauer2018Bayesian, author = {Benjamin Stadlbauer AND Leila Taghizadeh AND Jose Morales Escalante AND Clemens Heitzinger AND Andrea Cossettini AND Luca Selmi}, title = {{Bayesian} estimation for transport equations for nanocapacitors}, booktitle = {Proc. SIAM Conference on Uncertainty Quantification (UQ 2018)}, address = {Garden Grove, CA, USA}, key = {SIAM UQ 2018}, pages = {69-70}, month = {16--19 April}, year = 2018 }  @inproceedings{Cossettini2018calibration, author = {Andrea Cossettini AND Paolo Scarbolo AND Jose Morales Escalante AND Benjamin Stadlbauer AND Naseer Muhammad AND Leila Taghizadeh AND Clemens Heitzinger AND Luca Selmi}, title = {Calibration, compensation, parameter estimation, and uncertainty quantification for nanoelectrode array biosensors}, booktitle = {Proc. SIAM Conference on Uncertainty Quantification (UQ 2018)}, address = {Garden Grove, CA, USA}, key = {SIAM UQ 2018}, pages = {81}, month = {16--19 April}, year = 2018 }  @inproceedings{Khodadadian2018multi-level, author = {Amirreza Khodadadian AND Maryam Parvizi AND Clemens Heitzinger}, title = {Optimal multi-level {Monte Carlo} and adaptive grid refinement for the stochastic drift-diffusion-{Poisson} System}, booktitle = {Proc. SIAM Conference on Uncertainty Quantification (UQ 2018)}, address = {Garden Grove, CA, USA}, key = {SIAM UQ 2018}, pages = {81-82}, month = {16--19 April}, year = 2018 }  @inproceedings{Morales2018uncertainty, author = {Jose Morales Estimation AND Clemens Heitzinger}, title = {Uncertainty quantification for the {Boltzmann-Poisson} system}, booktitle = {Proc. SIAM Conference on Uncertainty Quantification (UQ 2018)}, address = {Garden Grove, CA, USA}, key = {SIAM UQ 2018}, pages = {93}, month = {16--19 April}, year = 2018 }  @inproceedings{Taghizadeh2018Bayesian, author = {Leila Taghizadeh AND Jose Morales Escalante AND Benjamin Stadlbauer AND Clemens Heitzinger}, title = {{Bayesian} estimation for a tomography problem}, booktitle = {Proc. SIAM Conference on Uncertainty Quantification (UQ 2018)}, address = {Garden Grove, CA, USA}, key = {SIAM UQ 2018}, pages = {138}, month = {16--19 April}, year = 2018 }  @inproceedings{Taghizadeh2017stochastic, author = {Leila Taghizadeh AND Amirreza Khodadadian AND Clemens Heitzinger}, title = {The stochastic drift-diffusion-{Poisson} system for modeling nanowire and nanopore sensors}, editor = {P. Quintela AND others}, booktitle = {Progress in Industrial Mathematics at ECMI 2016}, pages = {309-317}, year = 2017, volume = 26, organization = {Mathematics in Industry}, publisher = {Springer}, doi = {10.1007/978-3-319-63082-3_48}, abstract = {We use the stochastic drift-diffusion-Poisson system to model charge transport in nanoscale devices. This stochastic transport equation makes it possible to describe device variability, noise, and fluctuations. We present---as theoretical results---an existence and local uniqueness theorem for the weak solution of the stochastic drift-diffusion-Poisson system based on a fixed-point argument in appropriate function spaces. We also show how to quantify random-dopant effects in this formulation. Additionally, we have developed an optimal multi-level Monte-Carlo method for the approximation of the solution. The method is optimal in the sense that the computational work is minimal for a given error tolerance.} }  @inproceedings{Taghizadeh2017Bath, author = {Leila Taghizadeh AND Amirreza Khodadadian AND Clemens Heitzinger}, title = {Optimal multi-level randomized-quasi-{Monte-Carlo} methods for the stochastic drift-diffusion-{Poisson} system and for stochastic homogenization}, booktitle = {Proc. International Conference on Scientific Computation and Differential Equations 2017 (SciCADE 2017)}, address = {Bath, UK}, key = {SciCADE 2017}, pages = {129}, month = {11--15 Sep}, year = 2017 }  @inproceedings{Taghizadeh2017USNCCM, author = {Leila Taghizadeh AND Amirreza Khodadadian AND Stefan Rigger AND Clemens Heitzinger}, title = {Optimal multi-level {Monte-Carlo} methods for the stochastic drift-diffusion-{Poisson} system and for stochastic homogenization}, booktitle = {Proc. 14th US National Congress on Computational Mechanics (USNCCM)}, address = {Montreal, Canada}, key = {USNCCM 2017}, pages = {321}, month = {17--20 July 2017}, year = 2017 }  @inproceedings{Khodadadian2017USNCCM, author = {Amirreza Khodadadian AND Clemens Heitzinger AND Kiarash Hosseini AND Reza Kalantarinejad AND Marjan Hedayati AND Ali Manzour-ol-Ajdad}, title = {Optimal sensitivity of nanowire field-effect troponin sensors}, booktitle = {Proc. 14th US National Congress on Computational Mechanics (USNCCM)}, address = {Montreal, Canada}, key = {USNCCM 2017}, pages = {407}, month = {17--20 July 2017}, year = 2017, note = {\textit{Accepted for publication}} }  @inproceedings{Blankrot2017Salzburg, author = {Boaz Blankrot AND Clemens Heitzinger}, title = {Multiple scattering approach for dielectric metamaterial analysis}, booktitle = {Proc. 13th Austrian Numerical Analysis Day 2017}, address = {Salzburg, Austria}, key = {ANADAY 2017}, pages = {17}, month = {4--5 May}, year = 2017 }  @inproceedings{Khodadadian2017Salzburg, author = {Amirreza Khodadadian AND Leila Taghizadeh AND Clemens Heitzinger}, title = {Optimal multi-level {Monte Carlo} method for the stochastic drift-diffusion-Poisson system}, booktitle = {Proc. 13th Austrian Numerical Analysis Day 2017}, address = {Salzburg, Austria}, key = {ANADAY 2017}, pages = {16}, month = {4--5 May}, year = 2017 }  @inproceedings{Pammer2017Salzburg, author = {Gudmund Pammer AND Stefan Rigger AND Clemens Heitzinger}, title = {Computing cubature formulas for multisymmetric functions and applications to stochastic partial differential equations}, booktitle = {Proc. 13th Austrian Numerical Analysis Day 2017}, address = {Salzburg, Austria}, key = {ANADAY 2017}, pages = {15}, month = {4--5 May}, year = 2017 }  @inproceedings{Rigger2017Salzburg, author = {Stefan Rigger AND Gudmund Pammer AND Clemens Heitzinger}, title = {Approximation of multisymmetric functions}, booktitle = {Proc. 13th Austrian Numerical Analysis Day 2017}, address = {Salzburg, Austria}, key = {ANADAY 2017}, pages = {14}, month = {4--5 May}, year = 2017 }  @inproceedings{Mitscha-Baude2017Salzburg, author = {Gregor Mitscha-Baude AND Benjamin Stadlbauer AND Clemens Heitzinger}, title = {Simulation of nanopores with the {Poisson-Nernst-Planck-Stokes} and {Fokker-Planck} equations and adaptive finite elements}, booktitle = {Proc. 13th Austrian Numerical Analysis Day 2017}, address = {Salzburg, Austria}, key = {ANADAY 2017}, pages = {13}, month = {4--5 May}, year = 2017 }  @inproceedings{Stadlbauer2017Salzburg, author = {Benjamin Stadlbauer AND Gregor Mitscha-Baude AND Clemens Heitzinger}, title = {Brownian-dynamics simulations of nanopore protein sensing}, booktitle = {Proc. 13th Austrian Numerical Analysis Day 2017}, address = {Salzburg, Austria}, key = {ANADAY 2017}, pages = {12}, month = {4--5 May}, year = 2017 }  @inproceedings{Blankrot2017integral, author = {Boaz Blankrot AND Clemens Heitzinger}, title = {Integral equation solver for metamaterial design}, booktitle = {Proc. SIAM Conference on Computational Science and Engineering (CSE 2017}, address = {Atlanta, GA, USA}, key = {SIAM CSE 2017}, pages = {149}, month = {27 February -- 3~March}, year = 2017 }  @inproceedings{Heitzinger2017optimal, author = {Clemens Heitzinger AND Amirreza Khodadadian AND Gudmund Pammer AND Stefan Rigger AND Leila Taghizadeh}, title = {Optimal numerical methods for stochastic {PDEs}}, booktitle = {Proc. SIAM Conference on Computational Science and Engineering (CSE 2017}, address = {Atlanta, GA, USA}, key = {SIAM CSE 2017}, pages = {129}, month = {27 February -- 3~March}, year = 2017 }  @inproceedings{Heitzinger2016Julia, author = {Clemens Heitzinger}, title = {Julia and partial differential equations: being faster than {M*TL*B}}, booktitle = {Proc. JuliaCon 2016}, address = {Boston, MA, USA}, key = {JuliaCon 2016}, pages = {\url{http://juliacon.org/abstracts.html#PDEs}}, month = {21--25 June}, year = 2016 }  @inproceedings{Heitzinger2016stochastic, author = {Leila Taghizadeh AND Amirreza Khodadadian AND Clemens Heitzinger}, title = {The stochastic drift-diffusion-{Poisson} system for modeling nanowire and nanopore sensors}, booktitle = {Proc. 19th European Conference on Mathematics for Industry (ECMI 2016)}, address = {Santiago de Compostela, Spain}, key = {ECMI 2016}, series = {Mathematics in Industry}, publisher = {Springer}, pages = {86}, month = {13--17 June}, year = 2016 }  @inproceedings{Heitzinger2016optimal, author = {Clemens Heitzinger AND Caroline Geiersbach AND Leila Taghizadeh}, title = {Optimal numerical approaches to the stochastic homogenization of elliptic equations and to the stochastic drift-diffusion-{Poisson} system}, booktitle = {Proc. SIAM Conference on Mathematical Aspects of Materials Science (MS16)}, address = {Philadelpha, PA, USA}, key = {SIAM MS 2016}, pages = 136, month = {8--12 May}, year = 2016 }  @inproceedings{Stadlbauer2016modeling, author = {Benjamin Stadlbauer AND Andreas Buttinger-Kreuzhuber AND Gregor Mitscha-Eibl AND Clemens Heitzinger}, title = {Modeling the expected time to reach the recognition element in nanopore {DNA} sequencing}, booktitle = {Proc. SIAM Conference on Uncertainty Quantification 2016 (SIAM UQ16)}, address = {Lausanne, Switzerland}, key = {SIAM UQ 2016}, pages = 4, month = {5--8 April}, year = 2016 }  @inproceedings{Geiersbach2016Lausanne, author = {Caroline Geiersbach AND Gerhard Tulzer AND Clemens Heitzinger}, title = {Optimal approach for the calculation of stochastically homogenized coefficients of elliptic {PDEs}}, booktitle = {Proc. SIAM Conference on Uncertainty Quantification 2016 (SIAM UQ16)}, address = {Lausanne, Switzerland}, key = {SIAM UQ 2016}, pages = 124, month = {5--8 April}, year = 2016 }  @inproceedings{Pammer2016non-intrusive, author = {Gudmund Pammer AND Clemens Heitzinger}, title = {Non-intrusive stochastic {Galerkin} method for the stochastic nonlinear {Poisson-Boltzmann} equation}, booktitle = {Proc. SIAM Conference on Uncertainty Quantification 2016 (SIAM UQ16)}, address = {Lausanne, Switzerland}, key = {SIAM UQ 2016}, pages = 9, month = {5--8 April}, year = 2016 }  @inproceedings{Taghizadeh2016optimal, author = {Leila Taghizadeh AND Clemens Heitzinger}, title = {Optimal method for calculating solutions of the stochastic drift-diffusion-{Poisson} system}, booktitle = {Proc. SIAM Conference on Uncertainty Quantification 2016 (SIAM UQ16)}, address = {Lausanne, Switzerland}, key = {SIAM UQ 2016}, pages = 9, month = {5--8 April}, year = 2016 }  @inproceedings{Taghizadeh2016stochastic, author = {Leila Taghizadeh AND Amirreza Khodadadian AND Clemens Heitzinger}, title = {Stochastic modeling of dopant atoms in nanoscale transistors using multi-level {Monte Carlo}}, booktitle = {Proc. SIAM Conference on Uncertainty Quantification 2016 (SIAM UQ16)}, address = {Lausanne, Switzerland}, key = {SIAM UQ 2016}, pages = 9, month = {5--8 April}, year = 2016 }  @inproceedings{Taghizadeh2015optimal, author = {Leila Taghizadeh AND Amirreza Khodadadian AND Caroline Geiersbach AND Clemens Heitzinger}, title = {Optimal multi-level {Monte-Carlo} method for a system of stochastic {PDEs}}, booktitle = {Proc. SIAM Conference on the Analysis of Partial Differential Equations (SIAM PD15)}, address = {Scottsdale, AZ, USA}, key = {SIAM PD 2015}, pages = {76-77}, month = {7--10 December}, year = 2015 }  @inproceedings{Taghizadeh2015approach, author = {Leila Taghizadeh AND Caroline Geiersbach AND Clemens Heitzinger}, title = {Optimal approach for the numerical stochastic homogenization of elliptic problems}, booktitle = {Proc. SIAM Conference on Analysis of Partial Differential Equations (SIAM PD15)}, address = {Scottsdale, AZ, USA}, key = {SIAM PD 2015}, pages = {101-102}, month = {7--10 December}, year = 2015 }  @inproceedings{Heitzinger2015Taormina, author = {Clemens Heitzinger AND Leila Taghizadeh}, title = {The stochastic drift-diffusion-{Poisson} system for modeling nanoscale devices and a multi-level {Monte-Carlo} method}, booktitle = {Proc. 24th International Conference on Transport Theory (ICTT 2015)}, address = {Taormina, Italy}, key = {ICTT 2015}, pages = {115-116}, month = {7--11 September}, year = 2015 }  @inproceedings{Taghizadeh2015Taormina, author = {Clemens Heitzinger AND Leila Taghizadeh}, title = {Existence and uniqueness for the {Stokes}-{Nernst}-{Planck}-drift-diffusion-{Poisson} system for modeling nanowire sensors and nanopores}, booktitle = {Proc. 24th International Conference on Transport Theory (ICTT 2015)}, address = {Taormina, Italy}, key = {ICTT 2015}, pages = {117-118}, month = {7--11 September}, year = 2015 }  @inproceedings{Heitzinger2015Oxford, author = {Clemens Heitzinger}, title = {Advances in numerical methods for stochastic partial differential equations and stochastic homogenization}, booktitle = {Proc. New Directions in Numerical Computation: In Celebration of Nick Trefethen's 60th Birthday}, address = {Oxford, UK}, key = {LNT60}, pages = {24-25}, month = {25--28 August}, year = 2015 }  @inproceedings{Khodadadian2015SanDiego, author = {Amirreza Khodadadian AND Clemens Heitzinger}, title = {The signal-to-noise ratio due to biological noise in field-effect sensors calculated using the stochastic {Poisson} equation and polynomial-chaos expansion}, booktitle = {Proc. 13th US National Congress on Computational Mechanics (USNCCM)}, address = {San Diego, CA}, key = {USNCCM 2015}, pages = {501}, month = {26--30 July}, year = 2015 }  @inproceedings{Mitscha-Eibl2015SanDiego, author = {Gregor Mitscha-Eibl AND Andreas Buttinger-Kreuzhuber AND Gerhard Tulzer AND Clemens Heitzinger}, title = {Nonlinear coupling of the drift-diffusion-{Poisson} and {Stokes} systems for nanopore simulations}, booktitle = {Proc. 13th US National Congress on Computational Mechanics}, address = {San Diego, CA}, key = {USNCCM 2015}, pages = {707}, month = {26--30 July}, year = 2015 }  @inproceedings{Khodadadian2015Cachan, author = {Amirreza Khodadadian AND Clemens Heitzinger}, title = {Ionic currents through transmembrane proteins calculated by a transport equation for confined structures}, booktitle = {Proc. 4th International Conference on Computational and Mathematical Biomedical Engineering (CMBE 2015)}, address = {Cachan, France}, key = {CMBE 2015}, pages = {460-463}, month = {29~June -- 1~July}, year = 2015 }  @inproceedings{Tulzer2015noise, author = {Gerhard Tulzer AND Clemens Heitzinger}, title = {Noise and Fluctuations in Nanowire Biosensors}, booktitle = {Proc. 8th Vienna International Conference on Mathematical Modelling (MATHMOD 2015)}, address = {Vienna, Austria}, key = {MATHMOD 2015}, pages = {761-765}, month = {18--20 February}, year = 2015, pdf = {Papers/Tulzer2015noise.pdf} }  @inproceedings{Heitzinger2014Julia, author = {Clemens Heitzinger AND Gerhard Tulzer}, title = {{Julia} and the numerical homogenization of {PDEs}}, booktitle = {Proceedings of the First Workshop for High Performance Technical Computing in Dynamic Languages (HPTCDL 2014)}, address = {New Orleans, LA}, key = {HPTCDL 2014}, pages = {36-40}, month = {17 November}, year = 2014, publisher = {IEEE Press}, isbn = {978-1-4799-7020-9}, url = {http://dx.doi.org/10.1109/HPTCDL.2014.8}, doi = {10.1109/HPTCDL.2014.8} }  @inproceedings{Khodadadian2014Barcelona, author = {Amirreza Khodadadian AND Clemens Heitzinger}, title = {Using the stochastic {Poisson}-{Boltzmann} equation to quantify noise in nanowire bio- and gas sensors}, booktitle = {Proc. 11th World Congress on Computational Mechanics (WCCM XI)}, address = {Barcelona, Spain}, key = {WCCM XI}, pages = {A4187/1--2}, month = {20--25 July}, year = 2014 }  @inproceedings{Heitzinger2014transport, author = {Clemens Heitzinger AND Christian Ringhofer}, title = {Transport in confined structures as a multiscale problem and numerical results for nanopores}, booktitle = {Proc. SIAM Annual Meeting 2014}, address = {Chicago, IL, USA}, key = {SIAM AN14}, pages = 6, month = {7--11 July}, year = 2014 }  @inproceedings{Tulzer2014various, author = {Clemens Heitzinger AND Gerhard Tulzer}, title = {Various strategies for the numerical stochastic homogenization of the stochastic {Poisson} and {Helmholtz} equations}, booktitle = {Proc. SIAM Annual Meeting 2014}, address = {Chicago, IL, USA}, key = {SIAM AN14}, pages = 15, month = {7--11 July}, year = 2014 }  @inproceedings{Heitzinger2014OWR, author = {Clemens Heitzinger}, title = {Transport through confined structures as a multiscale problem}, booktitle = {Oberwolfach Reports}, series = {volume~11}, number = 2, pages = {1650-1653}, year = 2014, doi = {10.4171/OWR/2014/30} }  @inproceedings{Heitzinger2014stochastic, author = {Clemens Heitzinger}, title = {The stochastic {Poisson} and {Poisson}-{Boltzmann} equations applied to quantifying noise and fluctuations in nanoscale sensors}, booktitle = {Proc. 18th European Conference on Mathematics for Industry (ECMI 2014)}, address = {Taormina, Italy}, key = {ECMI 2014}, pages = {150-151}, month = {9--13 June}, year = 2014 }  @inproceedings{Tulzer2014Monte-Carlo, author = {Gerhard Tulzer AND Clemens Heitzinger}, title = {{Monte}-{Carlo} and Quasi-{Monte}-{Carlo} approaches for the numerical stochastic homogenization of elliptic partial differential equations}, booktitle = {Proc. 11th International Conference on Monte Carlo and Quasi-Monte Carlo Methods in Scientific Computing (MCQMC2014)}, address = {Leuven, Belgium}, key = {MCQMC 2014}, pages = {168}, month = {6--11 April}, year = 2014 }  @inproceedings{Khodadadian2014quasi-Monte-Carlo, author = {Amirreza Khodadadian AND Clemens Heitzinger}, title = {Quasi-{Monte}-{Carlo} methods for the linear and nonlinear stochastic {Poisson}-{Boltzmann} equations}, booktitle = {Proc. 11th International Conference on Monte Carlo and Quasi-Monte Carlo Methods in Scientific Computing (MCQMC2014)}, address = {Leuven, Belgium}, key = {MCQMC 2014}, pages = {167}, month = {6--11 April}, year = 2014 }  @inproceedings{Heitzinger2014uncertainty, author = {Clemens Heitzinger AND Amirreza Khodadadian}, title = {Uncertainty quantification in nanowire sensors using the stochastic nonlinear {Poisson}-{Boltzmann} equation}, booktitle = {Proc. SIAM Conference on Uncertainty Quantification (SIAM UQ14)}, address = {Savannah, Georgia, USA}, key = {SIAM UQ14}, pages = {87}, month = {31 March -- 3~April}, year = 2014 }  @inproceedings{Tulzer2013noise-level, author = {Gerhard Tulzer AND Stephan Steinhauer AND Elise Brunet AND Giorgio Mutinati AND Anton Köck AND Clemens Heitzinger}, title = {Noise-Level Analysis of Metal-Oxide Nanowire Gas-Sensor Signals for Selective Gas Detection}, booktitle = {Proc. International Conference on One-Dimensional Nanomaterials (ICON 2013)}, key = {ICON 2013}, pages = 161, address = {Annecy, France}, month = {23--26 September}, year = 2013 }  @inproceedings{Khodadadian2013simulation, author = {Amirreza Khodadadian AND Clemens Heitzinger}, title = {Simulation of Nanowire Sensors using the Stochastic {Poisson}-{Boltzmann} Equation}, booktitle = {Proc. 2nd International Conference on Mathematical Modeling in Physical Sciences (IC-MSQUARE 2013)}, pages = {19-20}, address = {Prague, Czech Republic}, key = {IC-MSQUARE 2013}, month = {1--5 September}, year = 2013 }  @inproceedings{Heitzinger2013OWR, author = {Clemens Heitzinger}, title = {Deterministic and stochastic homogenization problems with new applications in nanotechnology}, booktitle = {Oberwolfach Reports}, series = {volume~10}, number = 1, pages = {823-826}, year = 2013, doi = {10.4171/OWR/2013/14} }  @inproceedings{Tulzer2013Biodevices, author = {Gerhard Tulzer AND Stefan Baumgartner AND Elise Brunet AND Giorgio Mutinati AND Stephan Steinhauer AND Anton Köck AND Clemens Heitzinger}, title = {Modeling {$H_2$} Adsorption Processes at {SnO$_2$} Nanowire Surfaces: Parameter Estimation and Simulation}, booktitle = {Proc. 6th International Conference on Biomedical Electronics and Devices (BIODEVICES 2013)}, pages = {265-268}, address = {Barcelona, Spain}, key = {BIODEVICES 2013}, month = {11--14 February}, year = 2013, pdf = {Papers/Tulzer2013modeling.pdf} }  @inproceedings{Tulzer2012SIWAN, author = {Gerhard Tulzer AND Stefan Baumgartner AND Elise Brunet AND Giorgio Mutinati AND Stephan Steinhauer AND Anton Köck AND Clemens Heitzinger}, title = {Characteristics of {CO} and {H$_2$} detection with single nanowire gas sensors}, booktitle = {Proc. 5th Szeged International Workshop on Advances in Nanoscience 2012 (SIWAN 2012)}, pages = {36-37}, address = {Szeged, Hungary}, key = {SIWAN2012}, month = {24--27 October}, year = 2012 }  @inproceedings{Tulzer2012Eurosensors, author = {Gerhard Tulzer AND Stefan Baumgartner AND Elise Brunet AND Giorgio C. Mutinati AND Stephan Steinhauer AND Anton Köck AND Clemens Heitzinger}, title = {Inverse modeling of {CO} reactions at {SnO$_2$} nanowire surfaces for selective detection}, booktitle = {Proc. Eurosensors {XXVI} 2012}, address = {Krakow, Poland}, key = {Eurosensors 2012}, pages = {W2C-4/1--4}, month = {9--12 September}, year = 2012, note = {(Most prestigious European sensors conference.)} }  @inproceedings{Baumgartner2012CMAM, author = {Stefan Baumgartner AND Clemens Heitzinger}, title = {Modeling and Simulation of Nanowire Field-Effect Transistors}, booktitle = {Proc. Computational Methods in Applied Mathematics (CMAM 2012)}, address = {Berlin, Germany}, key = {CMAM 2012}, pages = {12-13}, month = {30 July -- 3~August}, year = 2012 }  @inproceedings{Tulzer2012CMAM, author = {Gerhard Tulzer AND Stefan Baumgartner AND Elise Brunet AND Giorgio Mutinati AND Stephan Steinhauer AND Anton Köck AND Clemens Heitzinger}, title = {Inverse modeling of {CO} adsorption processes at semiconductor nanowire surfaces for selective gas detection}, booktitle = {Proc. Computational Methods in Applied Mathematics (CMAM 2012)}, address = {Berlin, Germany}, key = {CMAM 2012}, pages = {54-55}, month = {30 July -- 3~August}, year = 2012 }  @inproceedings{Tulzer2012calculation, author = {Gerhard Tulzer AND Stefan Baumgartner AND Elise Brunet AND Giorgio C. Mutinati AND Stephan Steinhauer AND Anton Köck AND Clemens Heitzinger}, title = {Calculation of gas surface-reaction parameters at {SnO$_2$} nanowire surfaces}, booktitle = {Proc. 9th International Conference on Nanosciences and Nanotechnologies (NN12)}, address = {Thessaloniki, Greece}, key = {NN12}, pages = 59, month = {3--6 July}, year = 2012 }  @inproceedings{Baumgartner2012parallel, author = {Stefan Baumgartner AND Martin Vasicek AND Clemens Heitzinger}, title = {Parallel simulation of nanowire field-effect transistors}, booktitle = {Proc. 15th International Workshop on Computational Electronics (IWCE 15)}, address = {Madison, WI}, key = {IWCE 15}, pages = {245-246}, month = may, year = 2012 }  @inproceedings{Brunet2012fabrication, author = {Elise Brunet AND Gerhard Tulzer AND Stephan Steinhauer AND Giorgio Mutinati AND Anton Köck AND Martin Vasicek AND Clemens Heitzinger}, title = {Fabrication and simulation of {SnO$_2$} nanowire gas sensors}, booktitle = {Proc. 3rd International Congress on Nanotechnology in Medicine and Biology (BioNanoMed 2012)}, address = {Krems, Austria}, key = {BioNanoMed 2012}, month = mar, year = 2012, pages = {8} }  @inproceedings{Baumgartner2012self-consistent, author = {Stefan Baumgartner AND Martin Vasicek AND Clemens Heitzinger}, title = {Self-consistent simulation of nanowire field-effect biosensors}, booktitle = {Proc. 3rd International Congress on Nanotechnology in Medicine and Biology (BioNanoMed 2012)}, address = {Krems, Austria}, key = {BioNanoMed 2012}, month = mar, year = 2012, pages = {C6} }  @inproceedings{Baumgartner2012advanced, author = {Stefan Baumgartner AND Martin Vasicek AND Clemens Heitzinger}, title = {Advanced Modeling and Simulation of Nanowire Field-Effect Sensors}, booktitle = {Proc. 7th Vienna International Conference on Mathematical Modelling (MATHMOD 2012)}, address = {Vienna, Austria}, key = {MATHMOD 2012}, pages = {240-245}, month = feb, year = 2012, url = {http://www.ifac-papersonline.net/Detailed/58599.html}, doi = {10.3182/20120215-3-AT-3016.00042}, pdf = {Papers/baumgartner2012advanced.pdf}, abstract = {A 3d simulator for nanowire field-effect sensors and transistors including fast varying charge concentrations at an interface is presented. This simulator is based on a system of partial differential equations calculating the electrostatic potential of the whole device and the charge concentrations in the semiconducting nanowire. Therefore, three domains need to be modeled. The nanowire is described by the drift-diffusion-Poisson system, the Poisson-Boltzmann equation is used for the simulation of an aqueous solution, and the Poisson equation holds in the remaining oxide. Such devices can be used as gas sensors, and by functionalization of the nanowire surface, i.e., by attaching probe molecules, they can also be used for the detection of biomolecules in aqueous solutions. Binding of target molecules to the surface induces a field effect due to changes of charges in a small layer around the surface. This effect is responsible for the sensor response and hence is of paramount importance. A homogenization method resulting in two jump conditions is implemented which splits the computation into the charge of the boundary layer and into the remaining device. In order to take into account the geometry of the devices, 3d simulations are necessary and hence a parallelization technique has been developed. To include the jump conditions of the homogenization method, a novel finite-element tearing and interconnecting (FETI) method has been developed. With this simulator it is possible to solve the three dimensional and heterogeneous system of partial differential equations with discontinuities in feasible time using realizable computer power. As a result, sensitivity in terms of geometrical and physical properties can be predicted and sensors can be improved.} }  @inproceedings{Baumgartner2011eurosensors, author = {Stefan Baumgartner AND Martin Vasicek AND Clemens Heitzinger}, title = {Analysis of Field-Effect Biosensors Using Self-Consistent {3D} Drift-Diffusion and {Monte-Carlo} Simulations}, booktitle = {Proc. Eurosensors {XXV} 2011}, address = {Athens, Greece}, key = {Eurosensors 2011}, pages = {1275/1-4}, month = sep, year = 2011, pdf = {Papers/Poster - Eurosensors 2011.pdf}, note = {(Most prestigious European sensors conference.)} }  @inproceedings{Baumgartner2011design, author = {Stefan Baumgartner AND Martin Vasicek AND Alena Bulyha AND Nathalie Tassotti AND Clemens Heitzinger}, title = {Design Investigations of Nanowire Field-Effect Biosensors using Self-Consistent 3D Drift-Diffusion and {Monte-Carlo} Simulations}, booktitle = {Proc. 8th International Conference on Nanosciences and Nanotechnologies (NN11)}, address = {Thessaloniki, Greece}, key = {NN11}, pages = 88, month = jul, year = 2011, pdf = {Papers/baumgartner2011design.pdf} }  @inproceedings{Windbacher2010biotin, author = {Thomas Windbacher AND Viktor Sverdlov AND Siegfried Selberherr AND Clemens Heitzinger AND Norbert Mauser AND Christian Ringhofer}, title = {Simulation of Field-Effect Biosensors ({BioFETs}) for Biotin-Streptavidin Complexes}, booktitle = {AIP Conf. Proc. (Physics of Semiconductors: 29th International Conference on the Physics of Semiconductors)}, volume = 1199, pages = {507-508}, month = jan, year = 2010, isbn = {}, publisher = {AIP}, url = {http://link.aip.org/link/?APCPCS/1199/507/1}, pdf = {http://scitation.aip.org/getpdf/servlet/GetPDFServlet?filetype=pdf&id=APCPCS001199000001000507000001&idtype=cvips&prog=search}, doi = {10.1063/1.3295530}, abstract = {Biologically sensitive field-effect transistors (BioFETs) are a promising technology for detecting pathogens, antigen-antibody complexes, and tumor markers. A BioFET is studied for a biotin-streptavidin complex. Biotin-streptavidin is used in detection and purification of various biomolecules. The link between the Angstrom scale of the chemical reaction and the micrometer scale of the field effect device is realized by homogenized interface conditions.} }  @inproceedings{Heitzinger2009modeling, author = {Clemens Heitzinger AND Norbert Mauser AND Christian Ringhofer AND Yang Liu AND Robert W. Dutton}, title = {Modeling and Simulation of Orientation-Dependent Fluctuations in Nanowire Field-Effect Biosensors Using the Stochastic Linearized {Poisson}--{Boltzmann} Equation}, booktitle = {Proc. Simulation of Semiconductor Processes and Devices (SISPAD 2009)}, address = {San Diego, CA, USA}, key = {SISPAD 2009}, pages = {86-90}, year = 2009, month = sep, isbn = {978-1-4244-3947-8}, url = {http://ieeexplore.ieee.org/search/srchabstract.jsp?arnumber=5290244&isnumber=5290184&punumber=5290183&k2dockey=5290244@ieeecnfs&query=%28%28heitzinger%29%3Cin%3Eau+%29&pos=7&access=no}, pdf = {http://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=5290244&isnumber=5290184}, doi = {10.1109/SISPAD.2009.5290244}, abstract = {We use the stochastic linearized Poisson-Boltzmann equation to model the fluctuations in nanowire field-effect biosensors due to changes in the orientation of the biomolecules. Different orientations of the biomolecules with respect to the sensor surface due to Brownian motion have different probabilities. The probabilities of the orientations are calculated from their electrostatic free energy. The structure considered here is a cross section through a rectangular silicon nanowire lying on a an oxide surface with a back-gate contact. The oxide surface of the nanowire is functionalized by biomolecules in an electrolyte with an electrode. Various combinations of PNA (peptide nucleic acid), single-stranded DNA, and double-stranded DNA are simulated to discuss the various states of a DNA sensor. A charge-transport models yields the current through the transducer that compares well with measurements.}, note = {(Acceptance rate 57\%.)} }  @inproceedings{Punzet2009quantitative, author = {M. Punzet AND H. Karlic AND F. Varga AND C. Heitzinger AND D. Baurecht}, title = {Quantitative evaluation of surface modifications used for {BioFET}s by {FTIR}-{ATR} spectroscopy}, booktitle = {Proc. 4th International Workshop on Vibrational Spectroscopy of Thin Films}, address = {Potsdam, Germany}, pages = {}, year = 2009, month = {3--5 June}, isbn = {} }  @inproceedings{Windbacher2009study, author = {Thomas Windbacher AND Viktor Sverdlov AND Siegfried Selberherr AND Clemens Heitzinger AND Norbert Mauser AND Christian Ringhofer}, title = {Study of the Properties of Biotin-Streptavidin Sensitive {BioFET}s}, booktitle = {Proc. International Conference on Biomedical Electronics and Devices (BIODEVICES 2009)}, address = {Porto, Portugal}, pages = {24-30}, year = 2009, month = jan, isbn = {}, url = {}, pdf = {Papers/windbacher2009study.pdf}, abstract = {In this work the properties of a biotin-streptavidin BioFET have been studied numerically with homogenized boundary interface conditions as the link between the oxide of the FET and the analyte which contains the bio-sample. The biotin-streptavidin reaction pair is used in purification and detection of various biomolecules; the strong streptavidin-biotin bond can also be used to attach biomolecules to one another or onto a solid support. Thus this reaction pair in combination with a FET as the transducer is a powerful setup enabling the detection of a wide variety of molecules with many advantages that stem from the FET, like no labeling, no need of expensive read-out devices, the possibility to put the signal amplification and analysis on the same chip, and outdoor usage without the necessity of a lab.} }  @inproceedings{Liu2008overcoming, author = {Yang Liu AND Klas Lilja AND Clemens Heitzinger AND Robert W. Dutton}, title = {Overcoming the Screening-Induced Performance Limits of Nanowire Biosensors: a Simulation Study on the Effect of Electro-Diffusion Flow}, booktitle = {IEDM 2008 Technical Digest}, address = {San Francisco, CA, USA}, key = {IEDM 2008}, pages = {491-494}, year = 2008, month = dec, isbn = {1-4244-2377-4}, url = {http://ieeexplore.ieee.org/search/srchabstract.jsp?arnumber=4796733&isnumber=4796592&punumber=4786613&k2dockey=4796733@ieeecnfs&query=%28%28heitzinger%29%3Cin%3Eau+%29&pos=8&access=no}, pdf = {http://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=4796733&isnumber=4796592}, doi = {10.1109/IEDM.2008.4796733}, abstract = {Device-level simulation capabilities have been developed to self-consistently model the Si-nanowire (NW) biosensor systems. Our numerical study demonstrates that by introducing electro-diffusion current flow in the electrolyte solutions, the electrostatic screening of the biological charge can be significantly suppressed; an improvement of the sensed signal strength by more than approximately 10 times is indicated. Based on such an operation principle, the screening-induced performance limits on Si-NW biosensors can be overcome.}, note = {(Most prestigious electron-devices conference; acceptance rate$\approx$33\%.)} }  @inproceedings{Windbacher2008simulation, author = {Thomas Windbacher AND Viktor Sverdlov AND Siegfried Selberherr AND Clemens Heitzinger AND Norbert Mauser AND Christian Ringhofer}, title = {Simulation of Field-Effect Biosensors ({BioFETs})}, booktitle = {Proc. Simulation of Semiconductor Processes and Devices (SISPAD 2008)}, address = {Hakone, Japan}, key = {SISPAD 2008}, pages = {193-196}, year = 2008, month = sep, isbn = {978-1-4244-1753-7}, url = {http://ieeexplore.ieee.org/search/srchabstract.jsp?arnumber=4648270&isnumber=4648212&punumber=4636077&k2dockey=4648270@ieeecnfs&query=%28%28heitzinger%29%3Cin%3Eau+%29&pos=9&access=no}, pdf = {http://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=4648270&isnumber=4648212}, doi = {10.1109/SISPAD.2008.4648270}, abstract = {In this paper a bottom-up approach for modeling field-effect Biosensors (BioFETs) is developed. Starting from the given positions of charged atoms, of a given molecule, the charge and the dipole moment of a single molecule are calculated. This charge and dipole moment are used to calculate the mean surface density and mean dipole moment at the biofunctionalized surface, which are introduced into homogenized interface conditions linking the Angstrom-scale of the molecule with the micrometer-scale of the FET. By considering a single-stranded to double-stranded DNA reaction, we demonstrate the capability of a BioFET to detect a certain DNA and to resolve the DNA orientation.}, note = {(Acceptance rate 70\%.)} }  @inproceedings{Ertl2007efficient, author = {Otmar Ertl AND Clemens Heitzinger AND Siegfried Selberherr}, title = {Efficient Coupling of {Monte-Carlo} and Level-Set Methods for Topography Simulation}, booktitle = {Proc. Simulation of Semiconductor Processes and Devices (SISPAD 2007)}, address = {Vienna, Austria}, key = {SISPAD 2007}, pages = {417-420}, year = 2007, month = sep, isbn = {978-3-211-72860-4}, url = {}, pdf = {}, abstract = {We have developed a topography simulation method which combines advanced level-set techniques for surface evolution with Monte Carlo flux calculation. The result is an algorithm with an overall complexity and storage requirement scaling like$O(N \log N)$with surface disretization. The calculation of particle trajectories is highly optimized, since spatial partitioning is used to accelerate ray tracing. The method is demonstrated on Si etching in SF$_6$/O$_2$plasma.}, note = {(Acceptance rate 55\%.)} }  @inproceedings{Damodaran2007investigation, author = {Sriraman Damodaran AND Selvakumaran Vadivelmurugan AND Quoc-Thai Do AND Clemens Heitzinger AND Yang Liu AND Robert Dutton AND Gerhard Klimeck}, title = {Investigation of the Conductance of Silicon Nanowire Biosensors using the {2D} Drift-Diffusion Model}, booktitle = {Proc. 10th NSTI Nanotech Conference 2007 (NSTI Nanotech 2007)}, address = {Santa Clara, CA, USA}, key = {NSTI Nanotech 2007}, pages = {1374/1-3}, month = may, year = 2007, pdf = {Papers/damodaran2007investigation.pdf}, abstract = {Experiments for silicon biosensors with gate lengths in the range of 200nm to 500nm have not been extensively carried out. In this paper, simulations were performed for gate lengths proportionally smaller and greater than regular experimental gate lengths. The sensitivity of the biosensors was simulated using a 2D drift-diffusion model in cylindrical coordinates using the Prophet simulator. In this study simulated conductance results and the respective experimental values are compared. The good agreement between simulation and experiment enables us to predict and optimize the sensitivity of the DNA sensors. The sensitivity was studied in terms of conductance by varying the gate length, probe spacing, binding efficiency and angle of probe from normal.} }  @inproceedings{Ahmed2007symmetry, author = {Shaikh Ahmed AND Muhammad Usman AND Clemens Heitzinger AND Rajib Rahman AND Andrei Schliwa AND Gerhard Klimeck}, title = {Symmetry Breaking and Fine Structure Splitting in Zincblende Quantum Dots: Atomistic Simulations of Long-Range Strain and Piezoelectric Field}, booktitle = {AIP Conf. Proc.}, volume = 893, pages = {849-850}, month = apr, year = 2007, issn = {0094243X}, publisher = {AIP}, doi = {10.1063/1.2730157}, url = {http://link.aip.org/link/?APCPCS/893/849/1}, pdf = {http://scitation.aip.org/getpdf/servlet/GetPDFServlet?filetype=pdf&id=APCPCS000893000001000849000001&idtype=cvips&prog=normal}, abstract = {Electrons and holes captured in self-assembled quantum dots (QDs) are subject to symmetry breaking that cannot be represented in with continuum material representations. Atomistic calculations reveal symmetry lowering due to effects of strain and piezo-electric fields. These effects are fundamentally based on the crystal topology in the quantum dots. This work studies these two competing effects and demonstrates the fine structure splitting that has been demonstrated experimentally can be attributed to the underlying atomistic structure of the quantum dots.} }  @inproceedings{Usman2007strain, author = {Muhammad Usman AND Shaikh Ahmed AND Marek Korkusinski AND Clemens Heitzinger AND Gerhard Klimeck}, title = {Strain and Electronic Structure Interactions in Realistically Scaled Quantum Dot Stacks}, booktitle = {AIP Conf. Proc.}, volume = 893, pages = {847-848}, month = apr, year = 2007, issn = {0094243X}, publisher = {AIP}, doi = {10.1063/1.2730156}, url = {http://link.aip.org/link/?APCPCS/893/847/1}, pdf = {http://scitation.aip.org/getpdf/servlet/GetPDFServlet?filetype=pdf&id=APCPCS000893000001000847000001&idtype=cvips&ident=freesearch&prog=search}, abstract = {Self-assembled quantum dots (DQ) can be grown as stacks where the QD distance can be controlled with atomic layer control. This distance determines the interaction of the artificial atom states to form artificial molecules. The design of QD stacks becomes complicated since the structures are subject to inhomogeneous, long-range strain and growth imperfections such as non-identical dots and inter-diffused interfaces. This study presents simulations of stacks consistent of three QDs in their resulting inhomogeneous strain field. The simulations are performed with NEMO 3-D which uses the valence force field method to compute the strain and the empirical sp3d5s* tight binding method to compute the electronic structure. Strain is shown to provide a very interesting mixing between states and preferred ordering of the ground state in the top-most or bottom most quantum dot subject to growth asymmetries.} }  @inproceedings{Heitzinger2006investigation, author = {Clemens Heitzinger AND Gerhard Klimeck}, title = {Investigation of Conventional {DNAFET}s for Genome-wide Detection of Polymorphisms}, booktitle = {Proc. Eurosensors {XX} 2006}, address = {Göteborg, Sweden}, key = {Eurosensors 2006}, volume = 1, pages = {448-449}, month = sep, year = 2006, isbn = {91-631-9280-2}, pdf = {Papers/heitzinger2006investigation.pdf}, abstract = {Conventional SOI DNAFET devices, being able to detect single-nucleotide polymor phisms, are simulated in a comprehensive approach. These devices can be fabricated in high-density arrays and offer advantages compared to optical detection methods. The influence of device parameters like doping concentration and the size of the exposed sensor area is investigated.} }  @inproceedings{Klimeck2006nemo3d, author = {Gerhard Klimeck AND Michael McLennan AND Matteo Mannino AND Marek Korkusinski AND Clemens Heitzinger AND Rick Kennell AND Steven Clark}, title = {{NEMO 3-D} and {nanoHUB}: Bridging Research and Education}, booktitle = {Proc. 6th IEEE Conference on Nanotechnology (IEEE-NANO 2006)}, address = {Cincinnati, OH, USA}, key = {IEEE-NANO 2006}, volume = 2, pages = {441-444}, month = jun, year = 2006, isbn = {}, publisher = {IEEE}, url = {http://ieeexplore.ieee.org/search/freesrchabstract.jsp?arnumber=1717132&isnumber=36119&punumber=11219&k2dockey=1717132@ieeecnfs&query=%28%28heitzinger%29%3Cin%3Emetadata%29&pos=7}, pdf = {http://ieeexplore.ieee.org/iel5/11219/36119/01717132.pdf?tp=&isnumber=36119&arnumber=1717132&punumber=11219}, abstract = {The 3-D Nanoelectronic Modeling Tool (NEMO 3-D) is an electronic structure simulation code for the analysis of quantum dots, quantum wells, nanowires, and impurities. NEMO 3-D uses the Valence Force Field (VFF) method for strain and the empirical tight binding (ETB) for the electronic structure calculations. Various ETB models are available, ranging from single s orbitals (single band effective mass), over sp$^3$s* to sp$^3$d$^5$s* models, with and without explicit representation of spin. The code is highly optimized for operation on cluster computing systems. Simulations of systems of 64 million atoms (strain) and 21 million atoms have been demonstrated. This implies that every atom is accounted for in simulation volumes of (110nm)$^3$and (77nm)$^3, respectively. Such simulations require parallel execution on 64 itanium2 CPUs for around 12 hours. A simple effective mass calculation of an isolated quantum dot, in contrast, requires about 20 seconds on a single CPU. NEMO 3-D therefore offers the opportunity to engage both educators and advanced researchers, utilizing a single code. nanoHUB.org is the community web site hosted by the Network for Computational Nanotechnology (NCN) dedicated to bridge education, research, and development for the whole nanoscience and nanotechnology community. This paper reviews the mission of the NCN exemplified by the development and deployment of the NEMO 3-D tool.} }  @inproceedings{Sheikholeslami2005applications, author = {Alireza Sheikholeslami AND Farnaz Parhami AND Rene Heinzl AND Elaf Al-Ani AND Clemens Heitzinger AND Fuad Badrieh AND Helmut Puchner AND Tibor Grasser AND Siegfried Selberherr}, title = {Applications of Three-Dimensional Topography Simulation in the Design of Interconnect Lines}, booktitle = {Proc. Simulation of Semiconductor Processes and Devices (SISPAD 2005)}, address = {Tokyo, Japan}, key = {SISPAD 2005}, pages = {187-190}, year = 2005, month = sep, isbn = {4-9902762-0-5}, url = {http://ieeexplore.ieee.org/search/srchabstract.jsp?arnumber=1562056&isnumber=33165&punumber=10443&k2dockey=1562056@ieeecnfs&query=%28%28heitzinger%29%3Cin%3Emetadata%29&pos=9}, pdf = {http://ieeexplore.ieee.org/iel5/10443/33165/01562056.pdf?tp=&isnumber=33165&arnumber=1562056&punumber=10443}, abstract = {We present an analysis of deposition of silicon nitride and silicon dioxide layers into three-dimensional interconnect structures. The investigations have been performed using our general purpose topography simulator ELSA (Enhanced Level Set Applications). We predict void formation and its characteristics, which play an important role for the formation of cracks which are observed during the passivation of layers covering IC chips.}, note = {(Acceptance rate 57\%.)} }  @inproceedings{Sheikholeslami2005inverse, author = {Alireza Sheikholeslami AND Stefan Holzer AND Clemens Heitzinger AND Markus Leicht AND Oliver Häberlen AND Josef Fugger AND Tibor Grasser AND Siegfried Selberherr}, title = {Inverse Modeling of Oxid Deposition Using Measurements of a {TEOS} {CVD} Process}, booktitle = {Proc. PhD Research in Microelectronics and Electronics 2005}, address = {Lausanne, Switzerland}, volume = 2, pages = {79-82}, month = jul, year = 2005, url = {http://ieeexplore.ieee.org/search/srchabstract.jsp?arnumber=1542941&isnumber=32955&punumber=10358&k2dockey=1542941@ieeecnfs&query=%28%28heitzinger%29%3Cin%3Emetadata%29&pos=8}, pdf = {http://ieeexplore.ieee.org/iel5/10358/32955/01542941.pdf?tp=&isnumber=32955&arnumber=1542941&punumber=10358}, doi = {10.1109/RME.2005.1542941}, abstract = {The goal of this paper is to identify simulation models for the deposition of silicon dioxide layers from TEOS (tetraethoxysilane) in a CVD (chemical vapor deposition) process and to calibrate the parameters of these models by comparing simulation results to SEM (scanning electron microscope) images of deposited layers in trenches with different aspect ratios. We describe the three models used and the parameters which lead to the best results for each model which allows us to draw conclusions on the usefulness of the models.} }  @inproceedings{Heitzinger2004simulation, author = {Clemens Heitzinger AND Christian Ringhofer AND Shaikh Ahmed AND Dragica Vasileska}, title = {Efficient Simulation of the Full {Coulomb} Interaction in Three Dimensions}, booktitle = {Proc. 10th International Workshop on Computational Electronics (IWCE 10)}, address = {West Lafayette, IN, USA}, key = {IWCE 10}, pages = {24-25}, month = oct, year = 2004, isbn = {}, publisher = {IEEE}, url = {http://ieeexplore.ieee.org/search/srchabstract.jsp?arnumber=1407300&isnumber=30514&punumber=9657&k2dockey=1407300@ieeecnfs&query=%28%28heitzinger%29%3Cin%3Emetadata%29&pos=12}, pdf = {http://ieeexplore.ieee.org/iel5/9657/30514/01407300.pdf?tp=&isnumber=30514&arnumber=1407300&punumber=9657}, doi = {10.1109/IWCE.2004.1407300}, abstract = {The continued scaling of MOSFETs into the nano-scale regime requires refined models for carrier transport due to, e.g., unintentional doping in the active channel region which gives rise to threshold voltage and on-state current fluctuations. Therefore every transport simulator which is supposed to accurately simulate nano-devices must have a proper model for the inclusion of the Coulomb interactions. This paper proposes to use a 3D FMM (fast multi-pole method) (Greengard and Rokhlin, 1997; Cheng et al., 1999). The FMM is based on the idea of condensing the information of the potential generated by point sources in series expansions. After calculating expansions in a hierarchical manner, the long-range part of the potential is obtained by evaluating the series at the point in question and the short-range part is calculated by direct summation. Its computational effort is only O(n) where n is the number of particles. In summary, the use of the FMM approach for semiconductor transport simulations was validated. Simulation times are decreased significantly and effects due to electron-electron and electron-impurity interactions are observed as expected. Since the FMM algorithm operates independently of the grid used in the MC simulation, it can be easily included into existing MC device simulation codes.} }  @inproceedings{Sheikholeslami2004three-dimensional, author = {Alireza Sheikholeslami AND Clemens Heitzinger AND Tibor Grasser AND Siegfried Selberherr}, title = {Three-Dimensional Topography Simulation for Deposition and Etching Processes Using a Level Set Method}, booktitle = {Proc. 24th IEEE International Conference on Microelectronics (MIEL 2004)}, address = {Niš, Yugoslavia}, key = {MIEL 2004}, volume = 1, pages = {241-244}, year = 2004, month = may, isbn = {0-7803-8166-1}, url = {http://ieeexplore.ieee.org/search/srchabstract.jsp?arnumber=1314606&isnumber=29143&punumber=9193&k2dockey=1314606@ieeecnfs&query=%28%28heitzinger%29%3Cin%3Emetadata%29&pos=13}, pdf = {http://ieeexplore.ieee.org/iel5/9193/29143/01314606.pdf?tp=&isnumber=29143&arnumber=1314606&punumber=9193}, abstract = {We present the application of level set and fast marching methods to the simulation of surface topography of a wafer in three dimensions for deposition and etching processes. These simulations rest on many techniques, including a narrow band level set method, fast marching for the eikonal equation, extension of the speed function, transport models, visibility determination, and an iterative equation solver.} }  @inproceedings{Heitzinger2004study, author = {Clemens Heitzinger AND Alireza Sheikholeslami AND Josef Fugger AND Oliver Häber\-len AND Markus Leicht AND Siegfried Selberherr}, title = {A Case Study in Predictive Three-Dimensional Topography Simulation Based on a Level-Set Algorithm}, booktitle = {Proc. 205th Meeting of the Electrochemical Society (ECS), Electrochemical Processes in {ULSI} and {MEMS}}, editor = {H. Deligianni AND S.T. Mayer AND T.P. Moffat AND G.R. Stafford}, address = {San Antonio, TX, USA}, key = {205th Meeting of the ECS}, volume = {PV 2004-17}, pages = {132-142}, month = may, year = 2004, isbn = {1-56677-472-1}, publisher = {The Electrochemical Society}, pdf = {Papers/heitzinger2004study.pdf}, abstract = {The aim of this work is to study the etching of trenches in silicon and the generation of voids during the filling of genuinely three-dimensional trench structures with silicon dioxide or nitride. The trenches studied are part of the manufacturing process of power MOSFETs, where void-less filling must be achieved. Another area of applications is capacitance extraction in interconnect structures, where the deliberate inclusion of voids serves the purpose of reducing overall capacitance. Furthermore, these simulations make it possible to analyze the variations on the feature scale depending on the position of the single trench on the wafer and in the reactor.} }  @inproceedings{Minixhofer2003optimization, author = {Rainer Minixhofer AND Stefan Holzer AND Clemens Heitzinger AND Johannes Fellner AND Tibor Grasser AND Siegfried Selberherr}, title = {Optimization of Electrothermal Material Parameters Using Inverse Modeling}, booktitle = {Proc. 33rd European Solid-State Device Research Conference (ESSDERC 2003)}, editor = {José Franca AND Paulo Freitas}, address = {Estoril, Portugal}, key = {ESSDERC 2003}, pages = {363-366}, year = 2003, month = sep, isbn = {0-7803-7999-3}, publisher = {IEEE}, url = {http://ieeexplore.ieee.org/search/srchabstract.jsp?arnumber=1256889&isnumber=28111&punumber=8890&k2dockey=1256889@ieeecnfs&query=%28%28heitzinger%29%3Cin%3Emetadata%29&pos=16}, pdf = {http://ieeexplore.ieee.org/iel5/8890/28111/01256889.pdf?tp=&isnumber=28111&arnumber=1256889&punumber=8890}, doi = {10.1109/ESSDERC.2003.1256889}, abstract = {A method for determining higher order thermal coefficients for electrical and thermal properties of metallic interconnect materials used in semiconductor fabrication is presented. By applying inverse modeling on transient electrothermal three-dimensional finite element simulations the measurements of resistance over time of Polysilicon fuse structures can be matched. This method is intended to be applied to the optimization of Polysilicon fuses for reliability and speed.} }  @inproceedings{Badrieh2003feature, author = {Fuad Badrieh AND Helmut Puchner AND Alireza Sheikholeslami AND Clemens Heitzinger AND Siegfried Selberherr}, title = {From Feature Scale Simulation to Backend Simulation for a 100nm {CMOS} Process}, booktitle = {Proc. 33rd European Solid-State Device Research Conference (ESSDERC 2003)}, editor = {José Franca AND Paulo Freitas}, address = {Estoril, Portugal}, key = {ESSDERC 2003}, pages = {441-444}, year = 2003, month = sep, isbn = {0-7803-7999-3}, publisher = {IEEE}, url = {http://ieeexplore.ieee.org/search/srchabstract.jsp?arnumber=1256908&isnumber=28111&punumber=8890&k2dockey=1256908@ieeecnfs&query=%28%28heitzinger%29%3Cin%3Emetadata%29&pos=15}, pdf = {http://ieeexplore.ieee.org/iel5/8890/28111/01256908.pdf?tp=&isnumber=28111&arnumber=1256908&punumber=8890}, doi = {10.1109/ESSDERC.2003.1256908}, abstract = {The current challenge for TCAD is the prediction of the performance of groups of devices, backends, and -- generally speaking -- large parts of the final IC in contrast to the simulation of single devices and their fabrication. This enables one to predictively simulate the performance of the final device depending on different process technologies and parameters, which the simulation of single devices cannot achieve. In this paper we focus on the simulation of backend, interconnect capacitance, and time delays. To that end topography simulations of deposition, etching, and CMP processes in the various metal lines are used to build up the backend stack. The output of the feature scale simulations is used as input to a capacitance extraction tool, whose results are made available directly to the circuit designer. We discuss the utilized simulation tools and their integration. The topography simulations were performed by our tool called ELSA (enhanced level set applications) and the subsequent simulations by RAPHAEL. Finally simulation results for a 100nm process are presented, where the influence of void formation between metal lines profoundly impacts the performance of the whole interconnect stack.} }  @inproceedings{Heitzinger2003method, author = {Clemens Heitzinger AND Alireza Sheikholeslami AND Jong-Mun Park AND Siegfried Selberherr}, title = {A Method for Generating Structurally Aligned High Quality Grids and its Application to the Simulation of a Trench Gate {MOSFET}}, booktitle = {Proc. 33rd European Solid-State Device Research Conference (ESSDERC 2003)}, editor = {José Franca AND Paulo Freitas}, address = {Estoril, Portugal}, key = {ESSDERC 2003}, pages = {457-460}, year = 2003, month = sep, isbn = {0-7803-7999-3}, publisher = {IEEE}, url = {http://ieeexplore.ieee.org/search/srchabstract.jsp?arnumber=1256912&isnumber=28111&punumber=8890&k2dockey=1256912@ieeecnfs&query=%28%28heitzinger%29%3Cin%3Emetadata%29&pos=14}, pdf = {http://ieeexplore.ieee.org/iel5/8890/28111/01256912.pdf?tp=&isnumber=28111&arnumber=1256912&punumber=8890}, doi = {10.1109/ESSDERC.2003.1256912}, abstract = {The error of the numeric approximation of the semiconductor device equations particularly depends on the grid used for the discretization. Since the most interesting regions of the device are generally straightforward to identify, the method of choice is to use structurally aligned grids. Here we present an algorithm for generating structurally aligned grids including anisotropy and for producing grids whose resolution varies over several orders of magnitude. Furthermore the areas with increased resolution and the corresponding resolutions can be defined in a flexible manner and criteria on grid quality can be enforced. The grid generation algorithm was applied to sample structures which highlight the features of this method. Furthermore we generated grids for the simulation of a high voltage trench gate MOSFET. In order to resolve the junction regions accurately, four regions were defined where the grid was grown in several directions with varying resolutions. Finally device simulations performed by MINIMOS NT show current voltage characteristics and the threshold voltage.} }  @inproceedings{Wessner2003error, author = {Wilfried Wessner AND Clemens Heitzinger AND Andreas Hössinger AND Siegfried Selberherr}, title = {Error Estimated Driven Anisotropic Mesh Refinement for Three-Dimensional Diffusion Simulation}, booktitle = {Proc. Simulation of Semiconductor Processes and Devices (SISPAD 2003)}, address = {Boston, MA, USA}, key = {SISPAD 2003}, pages = {109-112}, year = 2003, month = sep, isbn = {0-7803-7826-1}, publisher = {IEEE}, url = {http://ieeexplore.ieee.org/search/srchabstract.jsp?arnumber=1233649&isnumber=27642&punumber=8729&k2dockey=1233649@ieeecnfs&query=%28%28heitzinger%29%3Cin%3Emetadata%29&pos=17}, pdf = {http://ieeexplore.ieee.org/iel5/8729/27642/01233649.pdf?tp=&isnumber=27642&arnumber=1233649&punumber=8729}, abstract = {We present a computational method for locally adapted conformal anisotropic tetrahedral mesh refinement. The element size is determined by an anisotropy function which is governed by an error estimation driven ruler according to an adjustable maximum error. Anisotropic structures are taken into account to reduce the amount of elements compared to strict isotropic refinement. The spatial resolution in three-dimensional unstructured tetrahedral meshes for diffusion simulation can be dynamically increased.} }  @inproceedings{Heitzinger2003algorithm, author = {Clemens Heitzinger AND Andreas Hössinger AND Siegfried Selberherr}, title = {An Algorithm for Smoothing Three-Dimensional {Monte Carlo} Ion Implantation Simulation Results}, booktitle = {Proc. 4th IMACS Symposium on Mathematical Modelling (MathMod 2003)}, editor = {I. Troch AND F. Breitenecker}, address = {Vienna, Austria}, key = {MathMod 2003}, pages = {702-711}, year = 2003, month = feb, isbn = {3-901608-24-9}, pdf = {Papers/heitzinger2003algorithm.pdf}, abstract = {We present an algorithm for smoothing results of three-dimensional Monte Carlo ion implantation simulations and translating them from the grid used for the Monte Carlo simulation to an arbitrary unstructured three-dimensional grid. This algorithm is important for joining various simulations of semiconductor manufacturing process steps, where data have to be smoothed or transferred from one grid to another. Furthermore different grids must be used since using ortho-grids is mandatory because of performance reasons for certain Monte Carlo simulation methods. The algorithm is based on approximations by generalized Bernstein polynomials. This approach was put on a mathematically sound basis by proving several properties of these polynomials. It does not suffer from the ill effects of least squares fits of polynomials of fixed degree as known from the popular response surface method. The smoothing algorithm which works very fast is described and in order to show its applicability, the results of smoothing a three-dimensional real world implantation example are given and compared with those of a least squares fit of a multivariate polynomial of degree two, which yielded unusable results.} }  @inproceedings{Heitzinger2002increasing, author = {Clemens Heitzinger AND Josef Fugger AND Oliver Häberlen AND Siegfried Selberherr}, title = {On Increasing the Accuracy of Simulations of Deposition and Etching Processes Using Radiosity and the Level Set Method}, booktitle = {Proc. 32th European Solid-State Device Research Conference (ESSDERC 2002)}, editor = {G. Baccarani AND E. Gnani AND M. Rudan}, address = {Florence, Italy}, key = {ESSDERC 2002}, pages = {347-350}, year = 2002, month = sep, isbn = {88-900847-8-2}, publisher = {University of Bologna}, url = {http://ieeexplore.ieee.org/search/srchabstract.jsp?arnumber=1503870&isnumber=32254&punumber=10060&k2dockey=1503870@ieeecnfs&query=%28%28heitzinger%29%3Cin%3Emetadata%29&pos=10}, pdf = {http://ieeexplore.ieee.org/iel5/10060/32254/01503870.pdf?tp=&isnumber=32254&arnumber=1503870&punumber=10060}, abstract = {Deposition and etching in Silicon trenches is an important step of today’s semiconductor manufacturing. Understanding the surface evolution enables to predict the resulting profiles and thus to optimize process parameters. Simulations using the radiosity modeling approach and the level set method provide accurate results, but their speed has to be considered when employing advanced models and for purposes of inverse modeling. In this paper strategies for increasing the accuracy of deposition simulations while decreasing simulation times are presented. Two algorithms were devised: first, intertwining narrow banding and extending the speed function yields a fast and accurate level set algorithm. Second, an algorithm which coarsens the surface reduces the computational demands of the radiosity method. Finally measurements of a typical TEOS deposition process are compared with simulation results both with and without coarsening of the surface elements. It was found that the computational effort is significantly reduced without sacrificing the accuracy of the simulations.} }  @inproceedings{Heitzinger2002simulation, author = {Clemens Heitzinger AND Josef Fugger AND Oliver Häberlen AND Siegfried Selberherr}, title = {Simulation and Inverse Modeling of {TEOS} Deposition Processes Using a Fast Level Set Method}, booktitle = {Proc. Simulation of Semiconductor Processes and Devices (SISPAD 2002)}, address = {Kobe, Japan}, key = {SISPAD 2002}, pages = {191-194}, year = 2002, month = sep, isbn = {4-89114-027-5}, publisher = {Business Center for Academic Societies, Japan}, url = {http://ieeexplore.ieee.org/search/srchabstract.jsp?arnumber=1034549&isnumber=22206&punumber=8038&k2dockey=1034549@ieeecnfs&query=%28%28heitzinger%29%3Cin%3Emetadata%29&pos=18}, pdf = {http://ieeexplore.ieee.org/iel5/8038/22206/01034549.pdf?tp=&isnumber=22206&arnumber=1034549&punumber=8038}, doi = {10.1109/SISPAD.2002.1034549}, abstract = {Deposition and etching of silicon trenches is an important manufacturing step for state of the art memory cells. Understanding and simulating the transport of gas species and surface evolution enables to achieve void-less filling of deep trenches, to predict the resulting profiles, and thus to optimize process parameters with respect to manufacturing throughput and the quality of the resulting memory cells. For the simulation of the SiO_2$deposition process from TEOS (Tetraethoxysilane), the level set method was used in addition to physical models. The level set algorithm devised minimizes computational effort while ensuring high accuracy by intertwining narrow banding and extending the speed function. In order to make the predictions of the simulation more accurate, model parameters were extracted by comparing the step coverages of the deposited layers in the simulation with those of SEM (scanning electron microscope) images.} }  @inproceedings{Heitzinger2002calibrated, author = {Clemens Heitzinger AND Siegfried Selberherr}, title = {A Calibrated Model for Silicon Self-Interstitial Cluster Formation and Dissolution}, booktitle = {Proc. 23rd IEEE International Conference on Microelectronics (MIEL 2002)}, address = {Niš, Yugoslavia}, key = {MIEL 2002}, pages = {431-434}, year = 2002, month = may, url = {http://ieeexplore.ieee.org/search/srchabstract.jsp?arnumber=1003291&isnumber=21637&punumber=7858&k2dockey=1003291@ieeecnfs&query=%28%28heitzinger%29%3Cin%3Emetadata%29&pos=19}, pdf = {http://ieeexplore.ieee.org/iel5/7858/21637/01003291.pdf?tp=&isnumber=21637&arnumber=1003291&punumber=7858}, doi = {10.1109/MIEL.2002.1003291}, abstract = {The formation and dissolution of silicon self-interstitial clusters is linked to the phenomenon of TED (transient enhanced diffusion) which in turn has gained importance in the manufacturing of semiconductor devices. Based on theoretical considerations and measurements of the number of self-interstitial clusters during a thermal step we were interested in finding a suitable model for the formation and dissolution of self-interstitial clusters and extracting corresponding model parameters for two different technologies (i.e., material parameter sets). In order to automate the inverse modeling part a general optimization framework was used. Additional to solving this problem the same setup can solve a wide range of inverse modeling problems occurring in the domain of process simulation. Finally the results are discussed and compared with a previous model.} }  @inproceedings{Grasser2002impact, author = {Tibor Grasser AND Hans Kosina AND Clemens Heitzinger AND Siegfried Selberherr}, title = {An Impact Ionization Model Including an Explicit Cold Carrier Population}, booktitle = {Proc. 5th International Conference on Modeling and Simulation of Microsystems (MSM 2002)}, address = {San Juan, Puerto Rico, USA}, key = {MSM 2002}, pages = {572-575}, year = 2002, month = apr, url = {http://www.nsti.org/procs/MSM2002/11/X21.08}, pdf = {http://www.nsti.org/publ/MSM2002/225.pdf}, abstract = {Conventional macroscopic impact ionization models which use the average carrier energy as main parameter cannot accurately describe the phenomenon in modern miniaturized devices. Here we present a new model which is based on an analytic expression for the distribution function. In particular, the distribution function model accounts explicitly for a hot and a cold carrier population in the drain region of MOS transistors. The parameters are determined by three even moments obtained from a solution of a six moments transport model. Together with a nonparabolic description of the density of states accurate closed form macroscopic impact ionization models can be derived based on familiar microscopic descriptions.} }  @inproceedings{Heitzinger2001optimization, author = {Clemens Heitzinger AND Siegfried Selberherr}, title = {Optimization for {TCAD} Purposes Using {Bernstein} Polynomials}, booktitle = {Proc. Simulation of Semiconductor Processes and Devices (SISPAD 2001)}, editor = {D. Tsoukalas AND C. Tsamis}, address = {Athens, Greece}, key = {SISPAD 2001}, pages = {420-423}, year = 2001, month = sep, isbn = {3-211-83708-6}, publisher = {Springer, Wien, New York}, pdf = {Papers/heitzinger2001optimization.pdf}, abstract = {The optimization of computationally expensive objective functions requires approximations that preserve the global properties of the function under investigation. The RSM approach of using multivariate polynomials of degree two can only preserve the local properties of a given function and is therefore not well-suited for global optimization tasks. In this paper we discuss generalized Bernstein polynomials that provide faithful approximations by converging uniformly to the given function. Apart from being useful for optimization tasks, they can also be used for solving design for manufacturability problems.} }  @inproceedings{Gehring2001TCAD, author = {Andreas Gehring AND Clemens Heitzinger AND Tibor Grasser AND Siegfried Selberherr}, title = {{TCAD} Analysis of Gain Cell Retention Time for {SRAM} Applications}, booktitle = {Proc. Simulation of Semiconductor Processes and Devices (SISPAD 2001)}, editor = {D. Tsoukalas AND C. Tsamis}, address = {Athens, Greece}, key = {SISPAD 2001}, pages = {416-419}, year = 2001, month = sep, isbn = {3-211-83708-6}, publisher = {Springer, Wien, New York}, pdf = {Papers/gehring2001tcad.pdf}, abstract = {We present simulations of a recently published SRAM memory gain cell consisting of two transistors and one MOS capacitor, representing an alternative to conventional six transistor SRAMs. Inverse modeling is used to fit a given device characteristic to measurement data. To account for de-charging due to tunneling, we use a simple, non-local tunneling model and calibrate it with data from literature. By optimization, we find values for the contact voltages in the off-region at which the retention time is a maximum.} }  @inproceedings{Pyka2001monitoring, author = {Wolfgang Pyka AND Clemens Heitzinger AND Naoki Tamaoki AND Toshiro Takase AND Toshimitsu Ohmine AND Siegfried Selberherr}, title = {Monitoring Arsenic In-Situ Doping with Advanced Models for Poly-Silicon {CVD}}, booktitle = {Proc. Simulation of Semiconductor Processes and Devices (SISPAD 2001)}, editor = {D. Tsoukalas AND C. Tsamis}, address = {Athens, Greece}, key = {SISPAD 2001}, pages = {124-127}, year = 2001, month = sep, isbn = {3-211-83708-6}, publisher = {Springer, Wien, New York}, pdf = {Papers/pyka2001monitoring.pdf}, abstract = {Experiments of As-doped poly-silicon deposition have shown that under certain process conditions step coverages > 1 can be achieved. We have developed a new model for the simulation of As-doped poly-silicon deposition, which takes into account surface coverage dependent sticking coefficients and surface coverage dependent As incorporation and desorption rates. The additional introduction of Langmuir type time-dependent surface coverage enabled the reproduction of the bottom-up filling of the trenches. In addition the rigorous treatment of the time-dependent surface coverage allows to trace the in-situ doping of the deposited film. Simulation results are shown for poly-Si deposition into 0.1$\mu$m wide and 7$\mu\$m deep, high aspect ratio
trenches.}
}


This file was generated by bibtex2html 1.99.